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Introduction to Microelectronic Fabrication Processes
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Introduction to Microelectronic Fabrication Processes
by Dr S Ramanathan

Usually in microelectronics fabrication the wafer-cleaning steps are performed before the high-temperature, layer deposition and/or lithography process steps. The intention of the cleaning is to remove particles and photo resistant residues, metallic impurities, and organic contamination....

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About This Course

Usually in microelectronics fabrication the wafer-cleaning steps are performed before the high-temperature, layer deposition and/or lithography process steps. The intention of the cleaning is to remove particles and photo resistant residues, metallic impurities, and organic contamination....

Course Curriculum
12 Sections
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Introduction to Microelectronic Fabrication Processes

Introduction

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    Chapter 1

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Introduction to Microelectronic Fabrication Processes

Lithography

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    Chapter 2

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Introduction to Microelectronic Fabrication Processes

About FEOL

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    Chapter 5

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Introduction to Microelectronic Fabrication Processes

Diffusion

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    Chapter 6

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Introduction to Microelectronic Fabrication Processes

Oxidation

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    Chapter 8

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Introduction to Microelectronic Fabrication Processes

Testing

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    Chapter 10

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Introduction to Microelectronic Fabrication Processes

Depostion Techniques

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    Chapter 3

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Introduction to Microelectronic Fabrication Processes

Removal Techniques

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    Chapter 4

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Introduction to Microelectronic Fabrication Processes

Ion Implantation

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    Chapter 7

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Introduction to Microelectronic Fabrication Processes

Process Integration

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    Chapter 9

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Introduction to Microelectronic Fabrication Processes

About Yield

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    Chapter 11

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Introduction to Microelectronic Fabrication Processes

Tools and Techniques

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    Chapter 12

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show 9 more sections
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